平板显示器用靶材
Targets For Flat Panel Display
|
材料(符号)
|
纯 度
|
形 状
|
最大尺寸
|
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氧化锌铝(AZO)靶
|
3N5
|
平面靶
|
300x110mm
|
|
氧化铌(Nb2O5)靶
|
3N5
|
平面靶
|
300x110mm
|
|
二氧化硅(SiO2)靶
|
4N
|
平面靶
|
1000x300mm
|
|
多晶硅(Si)靶
|
5N
|
平面靶
|
150x150mm
|
|
铌(Nb)靶
|
3N
|
平面靶
|
1000x300mm
|
|
钛(Ti)靶
|
2N5/4N5
|
平面靶
|
1500x300mm
|
|
钼(Mo)靶
|
3N5
|
平面靶
|
800x300mm
|
|
钽(Ta)靶
|
3N5
|
平面靶
|
1000x300mm
|
|
铬(Cr)靶
|
2N5/3N5
|
平面靶
|
600x200mm
|
|
镍&镍合金靶
|
3N
|
平面靶
|
1500x300mm
|
|
铝&铝合金靶
|
4N/5N
|
平面靶
|
1500x300mm
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